High yield adaptive laser nanomanufacturing system for photonic devices

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This project aims at developing an entirely new nanofabrication platform combining adaptive beamshaping with highly accurate large area nanopositioner to simultaneously address the throughput and accuracy challenges in nanomanufacturing. The proposed prototype system and fabricated photonic chips have performance far surpassing the state-of-the-art. Through trial in the industrial best laser nanofabrication system, commercial benefits can be fast tracked for Australian industry in the rapidly expanding nanomanufacturing field. The outcomes lead to a platform technology enabling broad impact and benefits to other high-tech applications requiring high precision and throughput, enhancing Australia’s leading position in advanced manufacturing.