High yield adaptive laser nanomanufacturing system for photonic devices

用于光子器件的高产量自适应激光纳米制造系统

• 批准号: LP210100467
• 负责人: Prof Baohua Jia
• 金额: $ 33.14万
• 依托单位: RMIT University
• 依托单位国家: 澳大利亚
• 项目类别: Linkage Projects
• 财政年份: 2023
• 资助国家: 澳大利亚
• 起止时间: 2023-07-18 至 2026-07-17
• 项目状态: 未结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/LP210100467
• 关键词: yield; adaptive; laser; nanomanufacturing; system

This project aims at developing an entirely new nanofabrication platform combining adaptive beamshaping with highly accurate large area nanopositioner to simultaneously address the throughput and accuracy challenges in nanomanufacturing. The proposed prototype system and fabricated photonic chips have performance far surpassing the state-of-the-art. Through trial in the industrial best laser nanofabrication system, commercial benefits can be fast tracked for Australian industry in the rapidly expanding nanomanufacturing field. The outcomes lead to a platform technology enabling broad impact and benefits to other high-tech applications requiring high precision and throughput, enhancing Australia’s leading position in advanced manufacturing.

该项目旨在开发一个全新的纳米制动平台，该平台将自适应梁的变形与高度准确的大面积纳米灵敏剂相结合，以同时解决纳米制造中的吞吐量和准确性挑战。拟议的原型系统和制造的光子芯片的性能远远超过了最新的。通过工业最佳激光纳米制造系统的试验，可以在迅速扩展的纳米制造领域对澳大利亚行业进行商业福利。结果导致了平台技术，从而为需要高精度和吞吐量的其他高科技应用程序带来广泛的影响和收益，从而增强了澳大利亚在高级制造业中的领先地位。