Development of real time monitoring for CVD thin film process by enhanced backscattering of light.

通过增强光反向散射开发实时监控 CVD 薄膜工艺。

• 批准号: 10650408
• 负责人: NAKAYAMA Junichi
• 金额: $ 1.92万
• 依托单位: KYOTO INSTITUTE OF TECHNOLOGY
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1998
• 资助国家: 日本
• 起止时间: 1998 至 1999
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-10650408/
• 关键词: Optical measurement; Enhanced backscattering; Speckle; Random surface; Random media; Correlation length; Stochastic functional; Periodic Fourier transform; 相関々数; 光散乱; 確率汎函数

During the 1998-1999 academic years, experimental study and analytical works were carried out as a basic research for developing a real time monitoring system based on the enhanced backscattering phenomenon of light.An experimental system for measuring an enhanced backscattering of light as well as image processing software were developed. It is demonstrated that real time monitoring becomes possible, without statistical processing by computer, when an object under test mechanically rotates. Using such a system, several object with randomness are measured successfully. Theoretical works for analyzing scattering phenomena of light were also carried out. By the stochastic functional method developed by the project leader, theoretical analysis was made for the scattering from a random surface and a thin film with random surfaces. Diffracted backscattering enhancement is predicted to take place in case of a periodic random surface. In case of a thick thin film, it is found that ripples appear in the angular distribution of the scattering. By use of the theory of stochastic functional of a binary sequence, the wave scattering from a periodic random surface generated from a binary sequence was studied. Periodic Fourier transform is developed as a new method for analyzing the wave diffraction and scattering from a finite periodic surface.

在1998-1999学年期间，作为开发基于光的后向散射增强现象的真实的实时监测系统的基础研究，进行了实验研究和分析工作，开发了测量光的后向散射增强的实验系统和图像处理软件。实验表明，当被测物体机械旋转时，不需要计算机进行统计处理，就可以实现真实的实时监测。利用该系统成功地测量了多个具有随机性的物体。还进行了分析光散射现象的理论工作。利用课题组提出的随机泛函方法，对随机表面和具有随机表面的薄膜的散射进行了理论分析。衍射后向散射增强的情况下发生的周期性随机表面预测。在厚薄膜的情况下，发现波纹出现在散射的角分布。利用二元序列的随机泛函理论，研究了由二元序列生成的周期随机表面的波散射问题。周期傅里叶变换是一种分析有限周期表面绕射和散射的新方法。

项目成果

Lan Gao: "Scattering of a TM Plane Wave from Periodic Random Surfaces"Waves in Random Media. 9. 53-67 (1999)

高兰：“周期性随机表面的TM平面波的散射”随机介质中的波。

Y. Tamura and J. Nakayama: "Mass operator for wave scattering from a slightly random surface"Waves in Random Media. Vol.9. 341-368 (1999)

Y. Tamura 和 J. Nakayama：“从稍微随机的表面散射波的质量算子”随机介质中的波。

Lan Gao: "Scattering of a TM Plane Wave from Periodic Random Surfaces"Waves in Random Media. 9・. 53-67 (1999)

高兰：“周期性随机表面的 TM 平面波的散射”随机介质中的波 53-67 (1999)。

J.Nakayama: "Periodic Fourier transform and its application to wave scattering from a finite periodic surface"IEICE Trans.Electronics. (印刷中).

J. Nakayama：“周期傅立叶变换及其在有限周期表面的波散射中的应用”IEICE Trans.Electronics（出版中）。

J. Nakayama: "Periodic Fourier transform and its application to wave scattering from a finite periodic surface (In Press"IEICE Trans. Electronics.

J. Nakayama：“周期傅立叶变换及其在有限周期表面的波散射中的应用（正在出版”IEICE Trans. Electronics。