Preparation of High-Performance Photosensitive Gel Films and Their Fine-Patterning

烷基取代的β-二酮和羟基取代的芳香酮制备光敏氧化锆凝胶薄膜：为了阐明化学修饰剂的结构与图案化性能的关系，用β-二酮和羟基取代的芳香酮对丁醇锆进行化学修饰，制备了氧化锆凝胶薄膜。研究发现，通过掩模紫外光照射和浸出可以形成精细的图形，某些薄膜具有比乙酰丙酮化学修饰的凝胶膜更高的光敏性。光敏Nb2O5凝胶膜的制备及其精细图案化：以苯甲酰丙酮化学修饰的Nb2O5为原料，采用溶胶-凝胶法制备了Nb2O5凝胶膜。紫外线照射后的凝胶膜通过掩模进行淋洗，得到掩模的精细负片图案。通过在…温度下的热处理，将非晶凝胶薄膜转变为多晶氧化Nb薄膜。超过600个℃。光敏SiO_2-ZrO_2凝胶膜的制备及其精细图案化：以苯甲酰丙酮化学修饰的正硅酸乙酯和丁酸锆为原料，采用溶胶-凝胶法制备了SiO_2-ZrO_2双组分凝胶薄膜。研究发现，凝胶薄膜是光敏的，通过掩膜和浸渍的紫外光照射可以形成精细的图形。光敏氧化锆凝胶薄膜的选择性着色：一种利用光敏凝胶薄膜的选择性着色新工艺。化学改性钛醇盐的光吸收和电子态：用DV-Xα团簇方法计算了不同取代基二酮稳定的钛醇盐的电子态。讨论了光吸收的来源和醇盐在光照射下分解反应的机理。较少

Preparation of Photosensitive ZrO2 Gel Films Using Alkyl-substituted β-Diketones and Hydroxyl-substituted Aromatic Ketones : In order to elucidate the relationship between the structures of chemical modification reagents and the patterning properties, ZrO2 gel films were prepared from zirconium butoxide chemically modified with β-diketones and hydroxyl-substituted aromatic ketones. It has been found that fine patterns can be formed by UV-irradiation through a mask and leaching, and some films have higher photosensitivvity than the gel film chemically modified with acetylacetone.Preparation of Photosensitive Nb2O5 Gel Films and Their Fine-Patterning : Nb2O5 gel films were prepared from niobium ethoxide chemically modified with benzoylacetone by the sol-gel method. Leaching of the gel films after UV-irradiation through a mask gave fine negative patterns of the mask. The amorphous gel films were converted to the polycrystalline niobium oxide films by the heat treatment at temperatures of … More more than 600℃. The polycrystalline films exhibited high refractive indices.Preparation of Photosensitive SiO2-ZrO2 Gel Films and Their Fine-Patterning : SiO2-ZrO2 two-component gel films were prepared from tetraethoxysilane and zirconium buthoxide chemically modified with benzoylacetone by the sol-gel method. It has been found that the gel films are photosensitive and fine patterns could be formed by UV-irradiation through a mask and leaching.Selective Coloration of Photosensitive ZrO2 Gel Films : A selective coloration process has been newly developed utilizing photosensitive gel films. The dye-containing SiO2 gel film on the unirradiated part of the ZrO2 gel film remained, while that on the irradiated part was removed upon rinsing.Optical Absorption and Electronic State of Chemically Modified Ti-Alkoxides : Electronic state of titanium alkoxides stabilized with β-diketones which had various substituents was calculated by the DV-X α cluster method. The origin of the optical absorption and the mechanism of the decomposition reaction of alkoxides with irradiation of light were discussed. Less