Ultra-high sensitivity and ultra-high speed electric-field sensor for operation measurement of integrated circuits and for detection of breakdown elements

用于集成电路运行测量和击穿元件检测的超高灵敏度、超高速电场传感器

• 批准号: 13650045
• 负责人: TAKIZAWA Kuniharu
• 金额: $ 2.3万
• 依托单位: Seikei University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2001
• 资助国家: 日本
• 起止时间: 2001 至 2004
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-13650045/
• 关键词: electro-optic crystal; light modulator; optical resonator; electro-optic coefficient; piezoelectric constant; LiNbO3; Shirenait compound; measurement of electric field; 電気光学効果; ファブリ・ペローエタロン; ファブリペローエタロン; 電界計測プローブ

The results of the research are as follows :1.The most suitable crystal structure for the electric-field sensor was clarified based on the analysis of the crystal optics.2.A novel longitudinal light modulator whose operation voltage is 50% or less of a conventional longitudinal light modulator has been proposed and fabricated.3.It was found that a Fabry-Perot type light modulator consisting of an electro-optic (EO) crystal, dielectric mirrors and transparent electrodes works by 1/100 or less of the operation voltages of a conventional longitudinal light modulator.4.13 kinds of EO crystals are suitable for the Fabry-Perot type light modulator. Especially, the θ angle Z-cut LiNbO_3 crystal and the Bi_<12>GeO_<20> crystal are promising.5.It was shown experimentally that the drive voltage of the Fabry-Perot modulator using Bi_<12>GeO_<20> crystal is 1/10 or less of the conventional light modulators.6.It was revealed that the phase of light propagating the EO crystal strongly depends on both the EO and inverse piezoelectric effects.7.The complete relative signs of EO and piezoelectric coefficients in LiNbO_3 crystal were decided.8.Two novel methods that precisely measure the electro-optically induced phase change of light propagating in the EO crystal have been proposed and precise values of EO coefficients of several crystals have been measured by using the methods.

研究结果如下：1.通过对晶体光学的分析，确定了最适合用于电场传感器的晶体结构; 2.提出并制备了一种新型纵向光调制器，其工作电压为传统纵向光调制器的50%或更低; 3.发现由电光晶体、介质镜和透明电极组成的法布里-珀罗型光调制器的工作电压为传统纵向光调制器的1/100或更低; 4. 13种电光晶体适合用于法布里-珀罗型光调制器。实验<12><20>结果表明，采用Bi_ GeO_3晶体制作的法布里-珀罗调制器的驱动电压<12><20>为传统调制器的1/10或更低;电光效应和逆压电效应对电光效应的影响很大;确定了LiNbO_3晶体电光效应和压电系数的完全相对符号;提出了两种精确测量电光效应和逆压电效应的新方法，并给出了实验结果。本文提出了光在电光晶体中传播时的光致相变的概念，并用此方法测量了几种电光晶体的电光系数。

项目成果

Design of longitudinal electro-optic modulators based on the Pockels and inverse-piezoelectric effects

基于普克尔斯和逆压电效应的纵向电光调制器设计

• 发表时间: 2003
• 期刊: IEICE Vol.J86-C, No.1
• 作者: Shinji Kobayashi;Hiroshi Kikuchi;Kuniharu Takizawa
• 通讯作者: Kuniharu Takizawa

Kuniharu Takizawa: "Analysis of electro-optic crystal-based Fabry-Perot etalons for high-speed spatial light modulators"Applied Optics. 42・2. 1052-1067 (2003)

Kuniharu Takizawa：“用于高速空间光调制器的基于电光晶体的法布里-珀罗标准具的分析”应用光学42・2（2003）。

滝沢國治: "高速空間光変調素子用電気光学ファブリ・ペロー共振器の解析"成蹊大学 工学研究報告. Vol.40, No.2. 57-72 (2003)

Kuniharu Takizawa：“高速空间光调制器的电光法布里-珀罗谐振器的分析”Seikei 大学工程研究报告，第 40 卷，第 57-72 期（2003 年）。

High Accuracy and high sensitivity measurements of the electro-optic effect in undoped and MgO doped LiNbO_3 crystals

未掺杂和MgO掺杂LiNbO_3晶体电光效应的高精度和高灵敏度测量

• 发表时间: 2006
• 期刊: Opt. Rev. 未定
• 作者: Kuniharu Takizawa;Yuji Yokota
• 通讯作者: Yuji Yokota

高速空間光変調素子用電気光学ファブリ・ペロー共振器の解析

高速空间光调制器电光法布里-珀罗谐振器分析

• 发表时间: 2003
• 期刊: 成蹊大学工学研究報告 Vol.40, No.2
• 作者: 滝沢國治;小林慎治;菊池 宏;滝沢國治;Kuniharu Takizawa;滝沢國治
• 通讯作者: 滝沢國治