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Development of Quartz Crystal Microbalance (QCM) sensor for quantification of suspended particulate matter (SPM) and its evaluation by three-dimensional numerical modeling and experiments

开发用于悬浮颗粒物（SPM）定量的石英晶体微天平（QCM）传感器，并通过三维数值建模和实验对其进行评估

基本信息

批准号：
14550221
负责人：
KAGAWA Yukio
金额：
$ 1.6万
依托单位：
Akita Prefectural University
依托单位国家：
日本
项目类别：
Grant-in-Aid for Scientific Research (C)
财政年份：
2002
资助国家：
日本
起止时间：
2002 至 2003
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-14550221/
关键词：
SPM QCM Sensor Finite Element Method Simulation Quartz Crystal Resonator Temperature characteristics Mode coupling

项目摘要

For the purpose of developing the suspended particulate matter (SPM) sensor, three-dimensional finite element modeling was examined, and some evaluation experiments were carried out. On the sensitivity for the adsorbate quantity, both agreed almost on the analytical result according to three-dimensional finite element model and two-dimensional model limited to the principal vibration mode. Mode coupling problem of multiple-channel QCM was analyzed using the two-dimensional finite element model. Not only that it establishes the trench between each vibrators but also that to absorb the vibration by the insertion in the trench of the damper material is effective were proven in order to avoid the mode coupling. Using the three-dimensional finite element model, frequency-temperature characteristics of the vibrator of AT-cut and Y-cut were analyzed. By calculating the temperature coefficient of the equivalent circuit parameter, it became possible that the action in constituting the SPM sensor circuit using the device under design was analyzed by the circuit simulator. Simulation and parameter identification method of adsorption film using the optimization algorithm and the transmission line model was developed. This identification method can be used for correcting measurement error by the existence of the film which adsorbs SPM. Measurement and detecting particle experiment of frequency-temperature characteristic of the AT cut vibrator were carried out. The validity of the numerical simulation of temperature characteristic was shown by the measurement of the temperature characteristic. In the detection experiment, it was confirmed that the particle detection by QCM is possible. The result of the basic development of the numerical simulation technology in this study seems to be useful for developing the SPM sensor.

为了研制悬浮颗粒物(SPM)传感器，进行了三维有限元建模，并进行了评价实验。在对吸附量的敏感性上，两种模型的分析结果基本一致，三维有限元模型和二维模型限于主振型。利用二维有限元模型分析了多通道QCM的模式耦合问题。不仅在振子之间建立了沟槽，而且通过在沟槽中插入阻尼器材料来吸收振动也是有效的，从而避免了模式耦合。利用三维有限元模型，分析了AT切和Y切振子的频率-温度特性。通过计算等效电路参数的温度系数，可以利用电路仿真器分析所设计器件在构成SPM传感器电路中的作用。提出了基于优化算法和传输线模型的吸附薄膜模拟与参数辨识方法。这种识别方法可用于利用吸附SPM的薄膜的存在来修正测量误差。对AT切可控震源的频率-温度特性进行了测量和质点实验。通过对温度特性的测量，验证了温度特性数值模拟的有效性。在检测实验中，证实了QCM检测颗粒的可行性。本研究数值模拟技术的基本发展成果对SPM传感器的研制具有一定的参考价值。