Research on High-speed and Microfabrication of Electrolyte Jet Machining

电解液喷射加工是通过在喷嘴和工件之间施加电压的同时，将电解水溶液从喷嘴喷射到工件来进行的。由于电流分布在一个狭窄的区域内，因此只有射流正下方的材料才能被电解加工。通过扫描喷嘴，可以在不使用掩膜的情况下应用于轴承表面的微槽和复杂形状。为了提高加工效率，实现微细加工，实现复杂的三维展成，减少喷嘴磨损，本研究进行了实验和仿真研究。结果，取得了以下成果：1.多喷嘴的使用提高了加工效率。通过在喷嘴和注射器之间插入过滤器来去除电解液中的微小异物颗粒。实现了内径为25微米的喷嘴加工。建立了加工复杂三维曲面的喷嘴轨迹和扫描速度的计算方法。通过实验和仿真验证了上述叠加方法的有效性。逐层叠加和区间优化是减小叠加误差的有效方法。由于加工过程中喷嘴的磨损是由于局部细胞现象引起的，因此采用一种金属材料制成的喷嘴消除了喷嘴的磨损。作为应用，进行了表面有凹陷的锯丝的制造。通过使用窄的矩形喷嘴，即使钢丝振动也能有效地在钢丝表面产生凹陷。

Electrolyte jet machining is carried out by jetting the electrolytic aqueous solution from a nozzle toward the workpiece while applying voltage between the nozzle and workpiece. Only the material directly under the jet is machined by electrolysis because the current is distributed in a narrow area. By scanning the nozzle, applications to micro grooves on bearing surface and complicated shapes were achieved without using masks. In this research, experiments and simulations were carried out in order to improve the machining efficiency, in order to realize micro machining, to realize complicated 3 dimensional generation, and to decrease the nozzle wear. As the results, the following achievements were obtained.1. The machining efficiency was improved by using multiple nozzles.2. The micro foreign particles in the electrolyte were removed by inserting a filter between the nozzle and syringe. And machining with a nozzle of 25 micron inner diameter was realized.3. A method to calculate the path and scanning speed of the nozzle for machining complicated 3 dimensional surfaces was established.4. The efficiency of the above superimposing method was confirmed by experiments and simulations.5. Layer-by-layer superimposing with interval optimization is an effective way to reduce superimposing error.6. Since the nozzle wear during machining occurs due to local cell phenomenon, the nozzle wear was eliminated by using the nozzle made of one kind of metal.7. As an application, manufacturing of a saw wire with dimples on its surface was carried out. By using a narrow rectangle nozzle, dimples on the wire surface were efficiently produced even if the wire vibrated.