Preparation of nano structured catalysts over silicon microchannel by mist thermal decomposition method

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Microchannel reactors with diameters of several hundred micrometers for chemical reactions attract considerable attentions. In order to apply the microchannel reactors for high temperature gaseous reactions, catalyst nano-particles were prepared over microchannel wall constructed on silicon plate with mist decomposition method. Aqueous solution of catalyst materials were atomized into mist by ultrasonic, which is thermally decomposed on the heated microchannel wall. Thus prepared catalytic microreactor was tested by dehydrogenation reaction and characterized with FT-IR microscope. Reaction intermediates on the catalyst and reaction path along with microchannel were discussed. Fundamental studies for low temperature liquid phase reaction also have been carried out on the basis of above studies.