RESEARCH ON ADVANCED NANO-MICRO MACHINE BY EMERGENCE AND ACTUATION OF NONLINEARITY

点击翻译按钮获取中文摘要

Recently, nano-micro machines are very attractive to many scientific fields and various applications are expected and investigated. In this research, dynamic control of micro-cantilever as an important mechanical element are treated. It is shown that the inherently existing nonlinearity of the nano-micro machine essentially affects the performance and based on the emergence and actuation, some nonlinear control methods are proposed for realizing high-performance micro-cantilever.