Development of a Triple-Scale Analysis for Implantable Piezoelectric Thin Films Actuators

点击翻译按钮获取中文摘要

In order to find new implantable piezoelectric materials, perovskite-type oxides have been examined by employing first-principles calculation. Computations indicated that MgSiO_3 has superiority on the phase transition from cubic structure to tetragonal one. Additionally, tetragonal MgSiO_3 has a large spontaneous polarization and it can exhibit the largest piezoelectric response. Next, a computational scheme of first-principles aided triple-scale analysis based on a process crystallography was developed to design implantable piezoelectric thin films fabricated on substrate. The developed triple-scale analysis was applied to a new implantable piezoelectric MgSiO_3 thin film. As a result, the computation indicated that Cr(110) substrate is most suitable for stable crystal growth of MgSiO_3 orientated to [101] direction and it outputs the high piezoelectric stress constants.