Development of Fast Multiscale Dynamic Simulation Method and Its Application and Verification in Power MEMS Design

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This study aims at the development of fast dynamic analysis method for a structure consisting of very large number of repeated unit microstructures and at the design, fabrication and experiment of MEMS combustor. With the use of model order reduction technique, a developed computational method is practical because it allows fast computing by parallel processing on a standard PC and also because it is capable of predicting the phenomena that may occur with very low probability considering the uncertainties of loading condition. Also stochastic homogenization method was developed that can predict the effect of misalignment of approximately 1, 000 nozzles in the flame holder. In the experiment, stable combustion with the temperature 1150K to 1350K was confirmed.