Evaluation of Transcription on Micro-structured Parts by Nano-Imprint Lithography Sacrificial Plastic Mold Insert Powder Injection Molding

本研究旨在开发利用纳米压印光刻技术(NIL)制备金属粉末注射成型(MIM)内嵌微牺牲塑料模具来制造微结构零件的方法。在NiL/μ-SPiMIM工艺中，充分制备了由纳米铜粉和聚缩醛基粘结剂组成的原料，模压成具有精细线扫描结构的聚甲基丙烯酸甲酯薄膜，成型零件在还原气体气氛中烧结，然后对薄膜进行溶剂脱脂。通过热重分析、碳氧分析和扫描电子显微镜观察，研究了脱脂和烧结过程中的行为。系统评价了烧结温度对烧结体密度、收缩和型材精度的影响。结果表明，本研究提出的NiIL/μ-SPiMIM制造方法在精密制造具有精细组织的三维复杂金属零件方面具有很大的潜力。

This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nano-sized copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and the molded parts were sintered in a reductive gas atmosphere followed by solvent debinding of the films. The behavior in debinding and sintering was investigated by thermo-gravimetric analysis, carbon and oxygen analysis and SEM observation. The effects of sintering temperature on sintered density and shrinkage, profile accuracy were evaluated systematically. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with fine micro-structures.