Evaluation of Transcription on Micro-structured Parts by Nano-Imprint Lithography Sacrificial Plastic Mold Insert Powder Injection Molding

本研究旨在发展一种利用纳米压印技术制备金属粉末注射成形（MIM）微牺牲塑料模具的微结构零件制造方法。在该工艺中，以纳米铜粉和聚缩醛为粘结剂，制备了纳米铜粉/聚缩醛/聚甲基丙烯酸甲酯薄膜，并在还原性气氛下烧结，然后进行溶剂脱脂。通过热重分析、碳氧分析和扫描电镜观察，研究了脱脂和烧结行为。系统地研究了烧结温度对烧结体密度、收缩率和轮廓精度的影响.研究结果表明，本文提出的NIL/μ-SPiMIM制造方法在制造具有精细微观结构的三维复杂金属零件方面具有很大的潜力。

This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nano-sized copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and the molded parts were sintered in a reductive gas atmosphere followed by solvent debinding of the films. The behavior in debinding and sintering was investigated by thermo-gravimetric analysis, carbon and oxygen analysis and SEM observation. The effects of sintering temperature on sintered density and shrinkage, profile accuracy were evaluated systematically. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with fine micro-structures.