Evaluation of Transcription on Micro-structured Parts by Nano-Imprint Lithography Sacrificial Plastic Mold Insert Powder Injection Molding

本研究旨在开发利用纳米压印技术制备的金属粉末注射成型（MIM）插入微牺牲塑料模具制造微结构零件的方法。在NIL/μ- spimm工艺中，以纳米级铜粉和聚缩醛基粘结剂为原料，制备了具有细线扫描结构的聚甲基丙烯酸甲酯薄膜，并在还原性气体气氛中烧结，然后对薄膜进行溶剂脱粘。通过热重分析、碳氧分析和扫描电镜观察，研究了其在脱粘和烧结过程中的行为。系统地评价了烧结温度对烧结密度、收缩率、型材精度的影响。由此可见，本文提出的NIL/μ- spimm制造方法在精密三维复杂金属零件的微结构制造方面具有很大的潜力。

This study aims to develop the manufacturing method of micro-structured parts by the metal powder injection molding (MIM) inserted micro-sacrificial plastic molds which were prepared by nano-imprint lithography (NIL) technique. In this process named NIL/μ-SPiMIM, the feedstock composed of nano-sized copper powder and polyacetal-based binder was adequately prepared and molded into polymethylmethacrylate films with fine line-scan structures, and the molded parts were sintered in a reductive gas atmosphere followed by solvent debinding of the films. The behavior in debinding and sintering was investigated by thermo-gravimetric analysis, carbon and oxygen analysis and SEM observation. The effects of sintering temperature on sintered density and shrinkage, profile accuracy were evaluated systematically. It can be concluded that the manufacturing method named NIL/μ-SPiMIM proposed in this study has great potential to produce precisely 3 dimensional complex metallic parts with fine micro-structures.