Evaluation of the microstructure and retention properties of plasma particles on mix-material deposition layer

利用透射电子显微镜分析了混合材料沉积层的物理性能。沉积层由非晶类碳和金属层组成。主要包括Fe的金属层似乎充当沉积层的剥离的引发剂。此外，沉积层中氢同位素的留存率高于体相碳材料。

Physical properties of Mix-material deposition layers were analyzed by using transmission electron microscopy. Deposition layers were composed by amorphous like carbon and metal layers. The metal layers mainly including Fe seem to act as the initiator of the exfoliation of the deposition layers. In addition, retention rate of hydrogen isotopes in deposition layer was higher than that of the bulk carbon materials.