Realization of thin films consisting of structured nanoelements by a self-organization method and evaluation of their mechanical properties

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Thin films consisting of structured nanoelements were fabricated by a self-organization method or glancing angle deposition, and their deformation and strength were experimentally investigated. An experimental method for evaluating the mechanical properties of nanoelements was developped. The mechanical anisotropy due to the asymmetric structure of oblique nanocolumns was evaluated using the method, and the mechanics of interface fracture in the nanoscale was clarified. In addition, high strength nano-composite structures were realized as a pioneered attempt.