evaluation of ultrahigh precision machining tool using on-machine measurement of diffratcion gratings

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A performance evaluation method of ultrahigh precision machine tools has been developed for the manufacturing of high-efficiency ultrahigh-dispersion diffraction gratings, using on-machine measurement units. In order to construct fabricating processes of diffraction grating groove, long-life diamond cutting tools for brittle materials, diamond burnishing for soft or amorphous metal materials tools has been developed. A compact laser autofocus displacement sensor has been developed and on-machine profile measurement system has been constructed and a profile of grating substrates has been measured. On-machine diffracted light measurement method has been developed, and a difference between burnished groove and micro cut groove has been observed.