Proposal of multifunct ional actuator operated by surface acoustic wave for micro total analysis system

近年来，微总量分析系统（μTAS）因其反应效率高、试剂用量少而受到广泛关注。在μ tas领域，对表面声波（SAW）致动器进行了研究，因为其结构非常简单。SAW是由一个数字间转换器（IDT）产生的。因此，我们研究了液压泵形状与液体流动之间的关系，以优化液压泵致动器。结果表明，优化后的IDT的节距取决于液体的粘度。在此基础上，采用运动粒子半隐式数值分析方法研究了液体流动的物理机理，为声表面波致动器的设计提供了理论依据。证明了液体的流动是由SAW的能量引起的，并受液体的粘度和液体与物质的波板之间的相互作用的影响。最后，根据实验和分析所获得的知识，设计并制作了一个用于混合和反应两种溶液的微型芯片。发现利用该芯片可以实现连续液体流动的局部快速混合。

Recently, micro total analysis systems(μTAS) have received a lot of attention for its efficiency in producing reactions and in reducing the used amount of reagents. In the area ofμTAS, s urface acoustic wave(SAW) actuators, because of their very simple structures, have studied. T he SAW is generated from an inter digital transduc er(IDT). We thus investigated t he relationship between IDT's shape s and liquid flows, in order to optimize the SAW actua tors. It was found that optimized IDT's pitch depends on viscosity of liquid. Then, in order to support de sign of the SAW actuators, we investigated the physical mechanism of the liquid flow by using numerical analysis of the moving parti cle semi-im plicit method. It was proven that the liquid flow is caused by t he energy of the SAW and is affected by the visco sity of the liquid and interaction between the liquid and a waved plate of a substance. Finally, on the knowledge obtained b y the experiment and the analysis, a micro chip for mixing and reacting 2 solutions was designed and fabricated. T he local and rapid mixing of conti nuous liquid flow was found to be pos sible by using the chip.