Proposal of multifunct ional actuator operated by surface acoustic wave for micro total analysis system

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Recently, micro total analysis systems(μTAS) have received a lot of attention for its efficiency in producing reactions and in reducing the used amount of reagents. In the area ofμTAS, s urface acoustic wave(SAW) actuators, because of their very simple structures, have studied. T he SAW is generated from an inter digital transduc er(IDT). We thus investigated t he relationship between IDT's shape s and liquid flows, in order to optimize the SAW actua tors. It was found that optimized IDT's pitch depends on viscosity of liquid. Then, in order to support de sign of the SAW actuators, we investigated the physical mechanism of the liquid flow by using numerical analysis of the moving parti cle semi-im plicit method. It was proven that the liquid flow is caused by t he energy of the SAW and is affected by the visco sity of the liquid and interaction between the liquid and a waved plate of a substance. Finally, on the knowledge obtained b y the experiment and the analysis, a micro chip for mixing and reacting 2 solutions was designed and fabricated. T he local and rapid mixing of conti nuous liquid flow was found to be pos sible by using the chip.