Development of multi-pixel microcalorimeters aiming for small scientific satellites

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More than half of baryons in the local Universe are unidentified and they are likely to distribute as warm-hot intergalactic medium (WHIM) with low density and about 1 million K. High-resolution X-ray spectroscopy of redshifted lines is the only method to detect WHIM and we aim for a study from a small satellite called DIOS. We have developed 400 pixel TES microcalorimeters with a techinque of multilayer wiring method in which wirings run in layers of Si substrate separated by insulation layers. TES bilayers showed good superconducting transition properties. Readoud method of TES calorimeter arrays using frequency domain multiplexing and base-band feedback techniques have been developed. Mechanical coolers are developed as engineering models for ASTRO-H and they can be used for DIOS. We also performed thermal and mechanical design of the payload and confirmed that all the system can be accommodated in the small satellite. International collaboration scheme was was also discussed.