Development of high resolution in-situ electric field observation system in a transmission electron microscope

对作者提出的一种在透射电子显微镜中显示电场和磁场的新方法--“阴影像畸变法”进行了空间分辨率上的改进，使之适用于纳米尺度的样品。研制了一种新型的光圈，并开发了一套利用CCD摄像机获取数字图像并进行自动分析的计算机软件。最高空间分辨率为74 nm，最快分析时间为20s。利用几何电子光学对理论进行了改进，给出了分别对透射式电子显微镜的聚光镜和物镜施加电流来控制灵敏度和像放大倍数的方法。该方法同样适用于高压电子显微镜，其灵敏度与中压电子显微镜相当。

A new method to visualize the electric and magnetic field in a transmission electron microscope named" Shadow Image Distortion" method which was invented by the author was modified in spatial resolution in order to be applicable for the nanoscale specimen. A new type of aperture and a computer software which obtained the digital image by using a CCD camera and analyze it automatically were developed. Highest spatial resolution and fastest analysis time were obtained to be 74 nm and 20 sec, respectively. Refinement of the theory using the geometrical electron optics gave the method to control the sensitivity and image magnification separately with the current applied to the condenser and objective lens of the transmission electron microscope. Also the method was found to be applicable to a high voltage electron microscope and the sensitivity was determined to be in the same order of a medium voltage electron microscope.