Development of a high sensitive and resolution angle sensor using single-cell photodiodes

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This research proposes an angle sensor using single-cell photodiodes to measure small tilt angles. This sensor can overcome a weakness in conventional technology. The weakness is decrease of S/N ratio because of the influence by the insensitive gap between the photodiode cells of multi-cell photodiode. In autocollimation method, when a light spot size is reduced to improve the sensitivity of angle sensor, the strongest central signal of the light spot intensity distribution decreases. The performance of the developed sensor is demonstrated.