Stabilization of air supply system for pneumatic vibration isolation table

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This research topic concerned stabilization of pressurized air supply systems such as those used in factories, in order to realize highly accurate and efficient pneumatic vibration isolation tables and servo stages for ultra precision devices. Conventional pressure control methods such as the use of pressure regulators and buffer tanks are incapable of cancelling the effects of variations in the supplied air pressure. In the present study, we proposed a fast and precise pressure control method for a pneumatic vibration isolation table which is capable of overcoming such problems. In addition, a new method has been proposed for controlling the air pressure in the air spring of the isolator to compensate for inclinations of the isolation table caused by relatively rapid movements of a servo stage on the table.