Study on multilayer interface structure for neutron supermirror with low diffuse intensity

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Study on multilayer interface structure of neutron supermirror has been performed for the realization of neutron focusing small angle scattering measurement. The technique oxidizing Ni and Ti layers showed an increase in neutron reflectivity by one order of magnitude in the momentum transfer region higher than 3nm-1. This implies that the multilayer structure is improved by the oxidation technique. Further studies on the multilayer interface structure are needed to understand the oxidation effect.