Error analysis and reduction in profilometry using multi-probe methods

2点法、3点法和拼接法得到的轮廓估计误差与实验值吻合较好，表明了误差估计的有效性。采用调零法的轮廓测量系统在测量中显示的系统误差可以避免由于测量位置误差引起的三点法三个位移仪的零差影响测量结果。此外，实验表明，零差的波动可以被检测出来，并以等于位移计分辨率的稳定性进行补偿。

The estimated errors for the profiles obtained by 2-point method, 3-point method, and stitching agree well with the experimental values and it shows validity for our error estimation. It also shows that the systematic error shown in the measurements by using our profile measurement system adopting zero-adjustment method, which prevents zero difference between the three displacement meters for 3-point method affecting the measurements, can be caused by error in the measurement positions. Furthermore, it was experimentally shown that the fluctuation of the zero difference can be detected and compensated with the stability equal to the resolution of the displacement meters.