Vapor Deposition of Carbon Alloy Catalysts with High Oxygen Electroreduction Activity by Nonequilibrium Plasma Chemical Reaction

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RF inductively coupled plasma which realizes a highly nonequilibrium condition with high electron temperature has a possibility of promoting unique chemical reactions. Then, the method of applying this plasma to chemical vapor deposition of carbon alloy catalyst which shows high oxygen electroreduction activity has devised. A tendency by which energy is efficiently inputted into the plasma has shown by considering plasma characteristics. And it has become synthesysable carbon materials which has a possibility of being the carbon alloy catalyst. Moreover, applicationsof this technology have also considered.