Amorphous structures on metal thin film with a surface of periodicself-organized nanostructures induced by femtosecond laser processing

飞秒激光加工诱导表面周期性自组织纳米结构的金属薄膜上的非晶结构

• 批准号: 22560720
• 负责人: HASHIDA Masaki
• 金额: $ 2.75万
• 依托单位: Kyoto University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2010
• 资助国家: 日本
• 起止时间: 2010 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-22560720/
• 关键词: 結晶・組成制御; ナノ周期構造; 非晶質; 金属; フェムト秒レーザー; フェムト秒レーザー加工; 非晶質金属薄膜; 高エネルギー金属イオン注入

The precise measurement for crystaldegree was performed on cupper thin film with transmission electron microscope. We have analyzed the electron diffraction patterns in the laser fluence of 0.08 -0.64 J/cm2where the grating structure is formed on thin films. It is found that the crystal structures are transformed depending on laser fluence; polycrystalline structures at <0.2 J/cm2, amorphous at ~ 0.23 J/cm2, and polycrystalline structures again at > 0.35 J/cm2. The mechanism of crystal structure transformation by femtosecond laser pulses is conceptually proposed, that is induced by the injection of energetic ions generated in the process of self-formation of periodic structures.

用透射电镜对铜薄膜的结晶度进行了精密测量。分析了在0.08 - 0.64J/cm ~ 2激光能量密度范围内，在薄膜上形成光栅结构时的电子衍射花样。发现晶体结构根据激光能量密度而转变;在<0.2 J/cm 2时为多晶结构，在~ 0.23 J/cm 2时为非晶结构，并且在> 0.35 J/cm 2时再次为多晶结构。从概念上提出了飞秒激光脉冲作用下晶体结构转变的机制，即在周期结构自形成过程中产生的高能离子注入诱发晶体结构转变。

项目成果

Mechanism of femtosecond lasernano-ablation for metals

飞秒激光纳米烧蚀金属机理

• 发表时间: 2012
• 作者: M. Hashida;M. Miyasaka;M. Shimizu;T.Ogata;H. Sakagami;S. Tokita;and S.Sakabe
• 通讯作者: and S.Sakabe

Mechanism forcrystal structure transformation onmetal surface by femtosecond laserpulses

飞秒激光脉冲金属表面晶体结构转变的机理

• 发表时间: 2011
• 作者: M. Hashida;Y. Miyasaka;Y. Ikuta;S.Tokita and S. Sakabe
• 通讯作者: S.Tokita and S. Sakabe

Crystal structures on a copper thin film with a surface of periodic self-organized nanostructures induced by femtosecond laser pulses

• DOI: 10.1103/physrevb.83.235413
• 发表时间: 2011-06
• 期刊: Physical Review B
• 影响因子: 3.7
• 作者: M. Hashida;Y. Miyasaka;Y. Ikuta;S. Tokita;S. Sakabe

レーザーと化学

激光和化学

• 发表时间: 2012
• 作者: 岡崎進;吉井範行;中島信昭・八ッ橋知幸
• 通讯作者: 中島信昭・八ッ橋知幸

Periodic Grating Structures Self- ‐formed by Femtosecond Laser Aablation for Metals

飞秒激光烧蚀金属自形成周期性光栅结构

• 发表时间: 2012
• 作者: 世利修美;蓑島創;奥谷昌之;Masaki Hashida
• 通讯作者: Masaki Hashida