Development of large deformation meshfree method and processoptimization in thermal nanoimprint

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A floating stress-point integration meshfree method and a mesh rezoning finite element method based on the incremental equilibrium equation are developed. Both methods are novel numerical method to analyze large deformation of soft materials, such as heated polymers and glasses, stably and accurately. These outcomes are expected to be effective means of the numerical optimization for fabrication processes with large deformation like thermal nanoimprint.