Evaluation of ZnO single crystal/thin film by precise ultrasonic measurements

利用精密超声测量技术，为氧化锌单晶和薄膜的质量评价奠定了基础。以具有精确声学物理常数的大块单晶为标准样品，发展了一种评价薄膜的技术。此外，研究了通过测量仅涉及一种电阻率和两种电阻率的两种超声波模式的相速度和传播衰减来确定电阻率的技术，以考虑各向异性来评估氧化锌的电阻率。

A foundation of evaluation method for bulk single crystal and thin film of zinc oxide was developed using a precise ultrasonic measurement technology. A technique for evaluating thin films was developed based on results of bulk single crystals with accurate acoustical physical constants used as standard specimens. Also, a technique of determining resistivities by measuring phase velocities and propagation attenuations of two ultrasonic wave modes concerning only one resistivity and both of two resistivities was investigated to evaluate the resistivity of the zinc oxide in consideration of anisotropy.