Research on aerosol deposition process of 3D structures and generation of ceramic particles through laser-cvd process

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In this study, the generation of ceramic particles by laser CVD technology and a focused acceleration and ultra-fine particles or ceramic metal was aerosolized in a He gas, to create a structure micro sintered-selectively deposited with a laser it fundamental study was conducted on the process. Showed that the sediment can produce high aspect ratio of a few mm in height by the number of 10μm in diameter by laser micro sintering process using a coaxial nozzle sequential laser light-first, ultra-fine particles flow. In addition, the laser CVD process, it was confirmed that the spherical particles that can generate carbon dioxide gas laser irradiation of titanium oxide to the metal alkoxide was vaporized gas.