Research on aerosol deposition process of 3D structures and generation of ceramic particles through laser-cvd process

在这项研究中，陶瓷颗粒的激光CVD技术和聚焦加速和超细颗粒或陶瓷金属雾化在He气体中的产生，以创建一个结构的微烧结选择性沉积与激光它的基础研究过程进行。结果表明，采用同轴喷嘴顺序激光光优先、超细颗粒流动的激光微烧结工艺，沉积物可产生直径10μm的高径比沉积物。另外，在激光CVD法中，确认了能够生成二氧化碳气体的球状粒子通过对氧化钛的激光照射而使金属醇盐气化。

In this study, the generation of ceramic particles by laser CVD technology and a focused acceleration and ultra-fine particles or ceramic metal was aerosolized in a He gas, to create a structure micro sintered-selectively deposited with a laser it fundamental study was conducted on the process. Showed that the sediment can produce high aspect ratio of a few mm in height by the number of 10μm in diameter by laser micro sintering process using a coaxial nozzle sequential laser light-first, ultra-fine particles flow. In addition, the laser CVD process, it was confirmed that the spherical particles that can generate carbon dioxide gas laser irradiation of titanium oxide to the metal alkoxide was vaporized gas.