FaVol.274,brication of periodic metal structure by interfering ultra-short pulse laser processing and application for surface-enhanced Raman spectroscopy

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Peculiar nano-sized and periodic metal structures such as nanowhisker and nanodrop in matrix can be fabricated by interfering ultra-short pulse laser processing of metal thin film via nano-sized metal liquid flow and solidification, which is called as Solid-Liquid-Solid (SLS) process. To apply these structures to plasmonic devices, large area processing was performed with controlling of processing profile by spatial light filter and Spatial-Light-Modulator (SLM) devices, and with 3D scanning processing technique. The system was applied to fabricate Surface-Enhanced Raman Scattering (SERS) substrate and MHA metamaterial, and their characters were examined. In addition, according to the observed results of nano-sized metal structures by scanning and transmission electron microscope, electro-magnetic field with laser irradiation was simulated by FDTD method, and the results proved the field enhancement effect.