Detection of free-radical in plasmas by terahertz frequency-domain spectroscopy

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The aim of this research is to do the in-situ analysis of the plasma-elementary reaction by establishing the method of measurement using Cavity Ring-Down detection at the terahertz region for the small-quantity unstable-molecules that is generated in the plasmas.In the experiment, the stable measurement could not be performed by the large error signal contained in the observed data of the frequency domain because the constructed measuring system did not have enough stability in mechanically and temporally.As the result, it becomes clear that there need more stable spectrometer and the plasma chamber with the thermal stability.