Development of Morphology Control of Aluminum Films by Vacuum Evaporation and Application to Various Functional Devices

发展了一种用真空蒸发法制备大比表面积铝膜和电解电容器、催化剂等功能器件模型的新技术。在460至520摄氏度之间的温度下将铝蒸发到加热的铝基板上，得到具有直径为约1微米的直立晶粒的孤立的柱状微结构的铝膜。具有该微结构的铝膜和由交流阻抗测量获得的光滑铝基板的双电层容量之间的比较显示出表面积增加了约2.6倍。使用基于铝沉积的表面等离子体共振的玻璃棒传感器测量汽油中的乙醇浓度。该传感器具有厚度为15 nm的蒸镀铝膜，并具有波长为400 nm的发光二极管和光电二极管。

A new technique for preparing aluminum films having large surface areas and models for functional devices such as electrolytic capacitors or catalysts by vacuum evaporation was developed. The evaporation of aluminum onto heated aluminum substrates at temperatures between 460 and 520 degrees C gave the aluminum films having an isolated and columnar microstructure of standing grains with a diameter of about 1 micrometer. The comparison between the electric double-layer capacities of the aluminum films having the microstructure and the smooth aluminum substrates obtained from AC impedance measurements showed about a 2.6 times increase in the surface area. Concentrations of ethanol in gasoline were measured using an aluminum-deposited surface plasmon resonance-based glass rod sensor. The sensor has the evaporated aluminum film with a thickness of 15 nm and with a light-emitting diode at a wavelength of 400 nm and a photodiode.