Modeling and consideration on electrostatic-structural-fluid coupled vibration of MEMS structure

为了研究悬臂梁结构的电场、变形和流体耦合振动特性，开发了静电-结构-流体耦合有限元分析程序。 通过考虑调节参数对耦合现象的影响，验证了耦合模型的有效性。 制作了微悬臂梁进行振动实验，在真空环境下观察到微悬臂梁的非线性耦合效应。通过与三现象耦合分析结果的比较，揭示了耦合效应对吸合特性的影响。

To clarify the characteristics of coupled mechanical vibration behavior among electric field, deformation and fluid for a cantilever micro beam structure, an electrostatic-structural-fluid coupled finite element analysis code was developed. By considering the influence of governing parameters on the coupled phenomenon, the validity of the coupled model was verified. Micro cantilever beams were fabricated for the vibration experiment, non-linear coupled effect of which was observed in the vacuum environment. Comparing the vibration characteristics in the air with those obtained by the three phenomenon coupled analysis, the pull in characteristics change was shown due to the coupled effect.