Development of high sensitive jerk sensor and realization of ultraprecision vibration control using jerk sensor

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This research aimed at realization of a high gain jerk sensor and application of the sensor. Especially it aimed at realization of new feedback control method for an object with flexural structure which usually had residual vibration problem. As a result, it is found that simultaneous feedback of table position and flexural structure jerk and acceleration is very effective in order to realize a control system so as not to excite the object vibration, even if the controlled object has flexural structure. Also the sensor is applied to bearing failure diagnosis system to detect abnormal vibration signal. It works better than an acceleration sensor which is used in conventional rotary machine diagnostic systems.