Study of optical modulation by surface plasmon resonance using MOS structure

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In order to develop a silicon optical modulator with features as compact footprint, high extinction ratio and low power consumption, optical modulation based on surface plasmon resonance using metal-oxide-semiconductor (MOS) structure is verified by numerical analysis and experimental. A surface plasmon is a coupling of electromagnetic wave and collective oscillation of electrons, generating at the interface of metal and dielectric. From the numerical analysis, it is confirmed that the proposed optical modulator with sizes of a few tens of um has high extinction ratio. The proposed optical modulator is fabricated actually, and the light modulation which seems to be due to surface plasmon resonance is confirmed.