Research of micropattern fabrication using functional material on a small area surrounding of which have highly uneven structures

使用功能材料在其周围小区域具有高度不均匀结构的微图案制造的研究

• 批准号: 23560867
• 负责人: MIKI Hirofumi
• 金额: $ 3.33万
• 依托单位: Wakayama University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2013
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23560867/
• 关键词: 溶射; コーティング; 粒子積層プロセス; ＭＥＭＳ; 微細加工; MEMS; 吐出機構; 高段差; 機能性インク; 微細パターン

In this research, a novel pumping mechanism, utilizing magnetic stress that generated by instantaneous magnetic filed gradient in ink, was proposed for the purpose to realize micro-patterns with functional materials on a small area surrounding of which is as high as several millimeters of uneven micro-structures. The capability of high pumping power and landing accuracy for the long flying distance of functional ink drop was evaluated. Structural design is the key for this pumping mechanism, and it was clear that there exist an optimum proportional relationship between the size of nozzle and ink channel span, and the angle to the channel entrance (75~80) in ink-tank, and arrangement of a non-magnetic thick layer in nozzle frontier (thickness: about half of the nozzle size) will be most effective to achieve the goal. Through fabrication process development including the heating mechanical derived new knowledge for the guidance of practical realization.

本研究提出一种利用油墨中瞬时磁场梯度产生的磁应力的新型泵送机制，以实现在小范围内由功能材料形成的微图案，其周围是高达几毫米的不均匀微结构。评估了功能性墨滴长飞行距离的高泵送功率和着陆精度的能力。结构设计是该泵送机构设计的关键，喷嘴尺寸与墨槽宽度、与墨槽入口夹角（75~80 °）之间存在最佳比例关系，在喷嘴前沿布置非磁性厚层（厚度约为喷嘴尺寸的一半）将最有效地实现这一目标。通过制作工艺的开发，包括加热机械推导出的新知识，为实际实现提供指导。

项目成果

Novel Inkjet Mechanism Uisng Pulsed Thermal-magnetic Driving 論文番号 (HU-10)

采用脉冲热磁驱动的新型喷墨机制 纸号 (HU-10)

• 发表时间: 2012
• 作者: H SUZUKI;J TOMA;T GODO;S YAMANE;K HOSOYA;T NAKAJIMA;H YAMAMOTO;幹 浩文
• 通讯作者: 幹 浩文

Thermal Magnetic Inkjet Mechanism for the Application of Micro Pattern Fabricatin on the Highly Unlevel Micro area

热磁喷墨机构在高度不平整微区域微图案加工中的应用

• 发表时间: 2012
• 作者: Hirofumi Miki (Han);K. Kikuchi and S. Tsuchitani
• 通讯作者: K. Kikuchi and S. Tsuchitani

Novel Inkjet Mechanism Using Pulsed Thermal-magnetic Driving

采用脉冲热磁驱动的新型喷墨机制

• 发表时间: 2012
• 作者: 豊田 匠;塚野 草太;山根 敏;Hirofumi Han (Miki)
• 通讯作者: Hirofumi Han (Miki)

A novel pumping device for the functional inkjet system

一种用于功能性喷墨系统的新型泵送装置

• 发表时间: 2014
• 作者: Hirofumi Miki;S. Murai;R. Tsuji;K. Kikuchi;S. Tsuchitani
• 通讯作者: S. Tsuchitani

Novel Inkjet Mechanism Using Pulsed Thermal magnetic Driving

采用脉冲热磁驱动的新型喷墨机制

• 发表时间: 2012
• 作者: Hirofumi Miki (Han);Murai Shinya;Kunitomo Kikuchi;Shigeki Tsuchitani;Yasuhiro Kosimoto
• 通讯作者: Yasuhiro Kosimoto