Development of reference-less wavelength scanning interferometerfor micro aspherical lens

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In this research, we developed two types of interferometercharacterized in that reference surface is not necessary. One is polar coordinate shearinginterferometer, which realizes wave front shearing for rotational and radial direction.Another is zero-method interferometer using spatial light modulator as a reference mirror.In the interferometer, the dynamic range was expanded by zero-methodology. Moreover, theevaluation method of phase detection algorithms were also developed. It is of assistance ofimprovement of phase detection algorithms.