Development of an air conveyor using swirling airflow to float LCD glass substrate

在本研究中，我们研究了一种新型的空气轴承单元，由于采用了涡流，所以被称为涡流轴承单元。首先以某涡轴承为研究对象，阐明了其基本特性，提出了设计原则。在此基础上，搭建了带涡轴承单元的空气输送装置，研究了影响玻璃基板在空气输送装置上浮选精度的因素。在此基础上，对提高浮选精度的供给条件、气流输送装置的设计等进行了探讨。

In the research we studied a new air bearing unit that is called as vortex bearing unit because of using vortex airflow. Firstly, we focused on one vortex bearing unit to clarify its basic characteristics and develop some design principles. Then, we built an air conveyor with vortex bearing units and investigated the factors that affect the flotation precision of the glass substrate when being floated and conveyed on the air conveyor. Based on the results, the supply conditions and design of air conveyor etc. were discussed for improving the flotation precision.