Development of an air conveyor using swirling airflow to float LCD glass substrate

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In the research we studied a new air bearing unit that is called as vortex bearing unit because of using vortex airflow. Firstly, we focused on one vortex bearing unit to clarify its basic characteristics and develop some design principles. Then, we built an air conveyor with vortex bearing units and investigated the factors that affect the flotation precision of the glass substrate when being floated and conveyed on the air conveyor. Based on the results, the supply conditions and design of air conveyor etc. were discussed for improving the flotation precision.