Development of Three-dimensional Micro- Rapid Prototyping Technique using Highspeed Confocal Scanner and Flow Measurement of Micro- Multiphase Flow

在本研究中，我们在微通道中开发了一种复杂三维形状的快速原型技术，用于红细胞行为阐明的模型实验。我们提出了一种使用DMD（数字镜像装置）与高速共聚焦扫描仪相结合的三维光刻技术。通过引入光束均质器和空间滤波器来消除光照不均匀性的光学设计，可以将整个区域的亮度差异降低到10%。由于共焦效应的固化光斑往往比理论共焦深度更厚，因此可以通过降低激光强度和延长曝光时间来实现更薄的聚合。

In this study, we develop a rapid prototyping technique of a complex three-dimensional shape in a microchannel that in mind for use in the model experiment for the behavior elucidation of the red blood cells. We have proposed a three-dimensional lithography using DMD (digital mirror device) in combination with high-speed confocal scanner. The optical design to eliminate the illumination non-uniformity is particularly concerned by introducing a beam homogenizer and spatial filter, and it reduces to 10% the difference in brightness over the entire region. Since the curing spot of confocal effect is tend to be thicker than the theoretical confocal depths, the possibility of thinner polymerization is indicated by decreasing the intensity of the laser and a longer exposure time.