Combined process of lithography and phase decomposition high aspect ratio nanofabrication

光刻与相分解高深宽比纳米加工相结合的工艺

• 批准号: 23656446
• 负责人: KOIZUMI Yuichiro
• 金额: $ 2.33万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23656446/
• 关键词: 転位; 析出; Ti-Al合金; 微細加工; リソグラフィー; 相分離; 塑性ひずみ; 相変態; チタンーアルミ合金; 層状組織; 選択溶解; 核生成・成長

Owing to the technologies for micromanufacturing and micromechanical testing, such as lithography and nano-indentation, the length scale of controllable heterogeneity has become comparable to that of microstructures formed by precipitation. In our study, three kinds of nanoplastic deformation methods including nano-imprinting, nano-indentation, and nanogrooving were conducted to produce local nanostrain on the supersaturated Ti3Al single crystals, focusing on the formation of periodic, parallel, basal dislocation bands with relatively high density. The effects of fine antiphase domains on the formation and motion of dislocations during nanoplastic deformation and the formation of plastic zone by combination of three kinds of slip systems were examined. The effect of the dislocation band produced by nanogrooving on the precipitation of gamma lamellae was also investigated.

由于光刻和纳米压痕等微制造和微力学测试技术的发展，可控非均质长度尺度已经可以与沉淀形成的微结构长度尺度相媲美。本研究通过纳米印迹、纳米压痕和纳米沟槽三种纳米塑性变形方法在过饱和Ti3Al单晶上产生局部纳米应变，重点是形成相对高密度的周期性、平行的基底位错带。研究了三种滑移体系联合作用下，细反相畴对纳米塑性变形过程中位错形成和运动的影响以及塑性区形成的影响。研究了纳米沟槽产生的位错带对层片析出的影响。

项目成果

Laminated Porous Structure Produced by Selective Dissolution and Anodization

通过选择性溶解和阳极氧化产生的层压多孔结构

• 发表时间: 2014
• 作者: 魏 代修;小泉 雄一郎;千葉 晶彦
• 通讯作者: 千葉 晶彦

Control of phase decomposition by nano-plastic deformation in Ti-39 at.%Al single crystal

控制%20of%20相%20分解%20by%20纳米塑料%20变形%20in%20Ti-39%20at.%Al%20单%20晶

• 发表时间: 2014
• 作者: 魏 代修;小泉 雄一郎;千葉 晶彦;西山 宏昭;山中 晃徳;吉野 雅彦
• 通讯作者: 吉野 雅彦

Control of phase decomposition by nano-plastic deformation in Ti-39 at.%Al single crysta

控制%20of%20相%20分解%20by%20纳米塑料%20变形%20in%20Ti-39%20at.%Al%20single%20crysta

• 发表时间: 2014
• 作者: Daixiu Wei;Yuichiro Koizumi;Akihiko Chiba;Hiroaki Nishiyama;Akinori Yamanaka;Masahiko Yoshino
• 通讯作者: Masahiko Yoshino

Refinement of Ti3Al Laminated Porous Structure by Hot Forging and Selective Dissolution

热锻和选择性溶解细化Ti3Al层状多孔结构

• 发表时间: 2013
• 作者: 魏代修;小泉雄一郎;千葉晶彦
• 通讯作者: 千葉晶彦

Nano-Plastic Deformation and Control of Phase Decomposition Phenomena in Lamellar Ti-Al alloy

层状Ti-Al合金纳米塑性变形及相分解现象的控制

• 发表时间: 2013
• 作者: Daixiu Wei;Yuichiro Koizumi;Akihiko Chiba;Shinpei Miyamoto;Kyosuke Yoshimi;Hiroaki Nishiyama;Akinori Yamanaka;Masahiko Yoshino
• 通讯作者: Masahiko Yoshino