Combined process of lithography and phase decomposition high aspect ratio nanofabrication

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Owing to the technologies for micromanufacturing and micromechanical testing, such as lithography and nano-indentation, the length scale of controllable heterogeneity has become comparable to that of microstructures formed by precipitation. In our study, three kinds of nanoplastic deformation methods including nano-imprinting, nano-indentation, and nanogrooving were conducted to produce local nanostrain on the supersaturated Ti3Al single crystals, focusing on the formation of periodic, parallel, basal dislocation bands with relatively high density. The effects of fine antiphase domains on the formation and motion of dislocations during nanoplastic deformation and the formation of plastic zone by combination of three kinds of slip systems were examined. The effect of the dislocation band produced by nanogrooving on the precipitation of gamma lamellae was also investigated.