Combined process of lithography and phase decomposition high aspect ratio nanofabrication

光刻与相分解高深宽比纳米加工相结合的工艺

• 批准号: 23656446
• 负责人: KOIZUMI Yuichiro
• 金额: $ 2.33万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Challenging Exploratory Research
• 财政年份: 2011
• 资助国家: 日本
• 起止时间: 2011 至 2012
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-23656446/
• 关键词: 転位; 析出; Ti-Al合金; 微細加工; リソグラフィー; 相分離; 塑性ひずみ; 相変態; チタンーアルミ合金; 層状組織; 選択溶解; 核生成・成長

Owing to the technologies for micromanufacturing and micromechanical testing, such as lithography and nano-indentation, the length scale of controllable heterogeneity has become comparable to that of microstructures formed by precipitation. In our study, three kinds of nanoplastic deformation methods including nano-imprinting, nano-indentation, and nanogrooving were conducted to produce local nanostrain on the supersaturated Ti3Al single crystals, focusing on the formation of periodic, parallel, basal dislocation bands with relatively high density. The effects of fine antiphase domains on the formation and motion of dislocations during nanoplastic deformation and the formation of plastic zone by combination of three kinds of slip systems were examined. The effect of the dislocation band produced by nanogrooving on the precipitation of gamma lamellae was also investigated.

由于微制造和微力测试的技术，例如光刻和纳米识别，可控异质性的长度尺度已与降水形成的微观结构相媲美。在我们的研究中，进行了三种纳米塑性变形方法，包括纳米压印，纳米注视和纳米底，以在过饱和的Ti3al单晶上产生局部纳米晶体，重点是定期，平行，平行，基础位错带的形成，具有相对高密度。检查了细胞塑料变形过程中良好的反相域对位错的形成和运动的影响，并检查了三种滑动系统的结合。还研究了纳米摩根产生的脱位带对伽马薄片沉淀产生的脱位带的影响。

项目成果

Laminated Porous Structure Produced by Selective Dissolution and Anodization

通过选择性溶解和阳极氧化产生的层压多孔结构

• 发表时间: 2014
• 作者: 魏 代修;小泉 雄一郎;千葉 晶彦
• 通讯作者: 千葉 晶彦

Control of phase decomposition by nano-plastic deformation in Ti-39 at.%Al single crystal

控制%20of%20相%20分解%20by%20纳米塑料%20变形%20in%20Ti-39%20at.%Al%20单%20晶

• 发表时间: 2014
• 作者: 魏 代修;小泉 雄一郎;千葉 晶彦;西山 宏昭;山中 晃徳;吉野 雅彦
• 通讯作者: 吉野 雅彦

Control of phase decomposition by nano-plastic deformation in Ti-39 at.%Al single crysta

控制%20of%20相%20分解%20by%20纳米塑料%20变形%20in%20Ti-39%20at.%Al%20single%20crysta

• 发表时间: 2014
• 作者: Daixiu Wei;Yuichiro Koizumi;Akihiko Chiba;Hiroaki Nishiyama;Akinori Yamanaka;Masahiko Yoshino
• 通讯作者: Masahiko Yoshino

Refinement of Ti3Al Laminated Porous Structure by Hot Forging and Selective Dissolution

热锻和选择性溶解细化Ti3Al层状多孔结构

• 发表时间: 2013
• 作者: 魏代修;小泉雄一郎;千葉晶彦
• 通讯作者: 千葉晶彦

Control of γ-TiAl Lamellae Precipitation from Supersaturated α_2-Ti_3Al Single Crystal by Local Plastic Straining

局部塑性应变控制过饱和α_2-Ti_3Al单晶γ-TiAl片晶析出

• 发表时间: 2013
• 作者: Yuichiro Koizumi;Toshihiro Yamazaki;Akihiko Chiba;Hiroaki Nishiyama
• 通讯作者: Hiroaki Nishiyama