SPP 1159: New Strategies for Measurement and Test Techniques for Production of Microsystems and Nanostructures

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Aim of the Priority Programme of emphasis is developing and making available new scientific strategies and methods based on profound knowledge for definition of parameters to describe the function oriented demands on components and surfaces, for the purposeful selection of technically and economically appropriate measuring procedures and measurement processes, the consideration of affecting influences or the representation of results of measurement for application in industrial manufacturing. Included are calibration procedures and standards appropriate to shop floor use. Thus available measuring principles in production of microsystems and nano-structured work pieces can be used to achieve function oriented, meaningful and traceable results in standardised measurement and test procedures. In the sub-projects of the programme basic principles and rules for definition of measured values, measuring procedures and design of elements of the testing chain are under research and the results are verified in practical tests.