Production of Highly Overdense Uniform Plasma with a large Area by ECH.

ECH 生产大面积高密度均匀等离子体。

• 批准号: 08680502
• 负责人: FUKAO Masayuki
• 金额: $ 1.6万
• 依托单位: Shizuoka University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08680502/
• 关键词: Overdense Plasama; Wide Area Uniform Plasma; ECH plasma; Multipoie; Averaged Minimum B; Closed Magnetic Field Lines; 閉磁力線

By combining an electron cyclotron resonance heating with a linear multipole magnetic field configuration, high density uniform plasmas with a large area has been asked. The plasma should be easily controllable in electron density and electron temperature and maintained easily with any kinds of gases. On the research experience to produce plasma with 2450 MHz RF source in a pulse mode operation, an equipment in steady operation necessary for applications to plasma CVD has been studied. To reduce the current to produce a magnetic field intensity necessary for ECH,an RF power of 430 MHz has been employed. As a result, stationary plasmas with electron density of as much as 2x1011 cm-3 has been realized, which density corresponds to a hundred times of the cut-off density of the used frequency. Probably, this will be the first experiment to show a clear results of ECR heating with such a low frequency. This is owing to the excellent plasma confinement characteristics of multipole configuration. Besides of this results in physics, it has been concluded by using a multipole that a truly uniform plasma can be formed in magnetic field-free zone in principle. If necessary, it is easily realized by increasing the pole number to produce a wider uniform plasma.

通过将电子回旋共振加热与线性多极磁场配置相结合，人们要求获得大面积的高密度均匀等离子体。等离子体的电子密度和电子温度应该易于控制，并且易于使用任何种类的气体来维持。根据以脉冲模式操作使用 2450 MHz RF 源产生等离子体的研究经验，研究了等离子体 CVD 应用所需的稳定运行的设备。为了减少电流以产生 ECH 所需的磁场强度，采用了 430 MHz 的射频功率。结果，实现了电子密度高达2x1011 cm-3的静止等离子体，该密度对应于所使用频率的截止密度的一百倍。也许，这将是第一个以如此低的频率显示 ECR 加热的清晰结果的实验​​。这是由于多极配置具有出色的等离子体限制特性。除了物理上的结果之外，还得出结论，通过使用多极，原则上可以在无磁场区域中形成真正均匀的等离子体。如果需要，可以通过增加极数来产生更宽的均匀等离子体来轻松实现。

项目成果

FUKAO,Masayuki et.al.: "Highly Overdense Uniform Plasmas by 430 MHz ECH in a Linear Multipole" Proc.of Int.Conf.on Plasma Phys. (ICPP 96). Vol.2. 1330-1333 (1996)

FUKAO、Masayuki 等人：“线性多极中 430 MHz ECH 的高度过密均匀等离子体”Proc.of Int.Conf.on Plasma Phys。

Masayuki Fukao et al: "Highly Overdense Uniform Plasmas by 430MHz ECH in a Linear Multipde" Proc.of Intenational Conference on Plasma Physics. 12K-09 (1997)

Masayuki Fukao 等人：“线性多极中 430MHz ECH 的高度过密均匀等离子体”等离子体物理国际会议论文集。