Characteristics of free-radical in a magnetized sheet plasma crossed with vertical gas-flow -production and quantitative mesurment-

与垂直气流交叉的磁化片状等离子体中自由基的特性-产生和定量测量-

• 批准号: 08680513
• 负责人: KAWAMURA Kazutaka
• 金额: $ 1.34万
• 依托单位: Tokai University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (C)
• 财政年份: 1996
• 资助国家: 日本
• 起止时间: 1996 至 1997
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-08680513/
• 关键词: sheet plasma; crossed with vertical gas-flow; free-radical; laser-induced fluorescence; photodetached method; negative-ion; atomic・molecular collision process; quantitative mesurment; OHラジカル; 電子のエネルギー分布; 解離過程

Free radicals play an important role in reaction mechanisms between plasma and neutral gas molecules mainly because of their outstanding physical and chemical properties. We have proposed a newly designed system of a magnetized sheet plasma system crossed with a vertical gas-flow. The geometry of this system expressed in th scale of plpasma thickness is estimated to be nearly onedimensional (1-D). Parameters affecting the free radicals and the plasma, such as reactive gas flow rate, plasma density, and electron temperature, are easily controlled by selecting the experimental conditions. Contact phenomena between gas and plasma are analyzed by using laser-induced fluorescence (LIF), a photodetached method and an electrical probe. The LIF spectroscopy is a highly sensitive method for detecting free radicals. Therefore, a quantitative analysis of free radicals based on a simple model can be achieved in the magnetized sheet plasma system crossed with the vertical gas-flow.In this research we studied the measurement of the number density of hydroxyl (OH) free radicals in the magnetized sheet plasma of argon crossed with vertical gas flow mixed of O_2-H_2 gas mixture. The OH free radical is the most commonly studied combustion species and is an important species from the view point of environment studies. Also, we demonstrated the measurement of the number density of O^- and O^-_ in the magnetized sheet plasma of argon crossed with vertical gas flow of O_2 gas. These negative ions are an important species for plasma processing and environment studies. Our results can be useful in determining the optimum conditions for negative ion production as well as in explaining the complex phenomena involved in the collisions between neutral gas molecules and plasma in relation to various plasma parameters.

自由基具有优异的物理化学性质，在等离子体与中性气体分子的反应机理中起着重要的作用。我们提出了一种新设计的磁化片等离子体系统，该系统与垂直气流交叉。该系统的几何形状用原生物质厚度的标度表示，估计接近一维(一维)。通过选择实验条件，可以很容易地控制影响自由基和等离子体的参数，如反应气体流量、等离子体密度和电子温度。用激光诱导荧光(LIF)法、光分离法和电探针分析了气体与等离子体的接触现象。激光诱导荧光光谱是检测自由基的一种高度灵敏的方法。因此，在与垂直气流交叉的磁化薄片等离子体系统中，可以实现基于简单模型的自由基的定量分析。在本研究中，我们研究了与垂直气流O2-H2混合气体交叉的Ar磁化薄层等离子体中羟基(OH)自由基数密度的测量。OH自由基是研究最多的燃烧物种，从环境研究的角度来看，是一种重要的物种。我们还给出了与O_2垂直气流交叉的Ar磁化片状等离子体中O^-和O^-_数密度的测量结果。这些负离子是等离子体处理和环境研究的重要物种。我们的结果可用于确定产生负离子的最佳条件，以及解释中性气体分子与等离子体碰撞涉及的复杂现象与各种等离子体参数的关系。

项目成果

M.Takatori,A.Tonegawa,K.Kawamura,K.Takayama,: "Measurement of the density and the temperature of OH free-radical in a magnetized sheet plasma crossed with vertical gas-flow," Proc.3rd Int.Conf.on Reactive Plasma. 1. 469-472 (1997)

M.Takatori、A.Tonekawa、K.Kawamura、K.Takayama，：“在与垂直气流交叉的磁化片状等离子体中测量 OH 自由基的密度和温度”，Proc.3rd Int.Conf。

T.Yajima, A.Tonegawa, K.Kawamura, at.al.: "Spectroscopic Measurements of Ion Temperature in Sheet Plasma and String Plasma" J.Nuclear Science and Technology. Vol.33. 886-888 (1996)

T.Yajima、A.Tonekawa、K.Kawamura 等人：“片状等离子体和弦等离子体中离子温度的光谱测量”J.Nuclear Science and Technology。

M.Takatori, A.Tonegawa, K.Kawamura, K.Takayama: "Measurement of the density and the temperature of OH free-radical in a magnetized shteet plasma crossed with vertical gas-flow" Proc.3rd Int.Conf.on Reactive Plasma. 1. 469-472 (1997)

M.Takatori、A.Tonekawa、K.Kawamura、K.Takayama：“测量与垂直气流交叉的磁化片状等离子体中 OH 自由基的密度和温度”Proc.3rd Int.Conf.on Reactive

M.Tatsumoto, A.Tonegawa, K.Takayama, at.al.: "Production of OH free radical using sheet plasma with vertical gas-flow" Vacuum. Vol.47. 1039-1041 (1996)

M.Tatsumoto、A.Tonekawa、K.Takayama 等人：“利用垂直气流的片状等离子体产生 OH 自由基”真空。

M.Tatsumoto, A.Tonegawa, K.Takayama: "Production of OH free radical using sheet plasma with vertical gas-flow" Vacuum. 47. 1039-1041 (1996)

M.Tatsumoto、A.Tonekawa、K.Takayama：“利用垂直气流的片状等离子体产生 OH 自由基”真空。