Interconnection of Amorphous Alloys by Cleaning and Activating their Surfaces

我们首先研究了Pd；lt；40&gt；Ni_&lt；40&gt；P_&lt；20&gt；金属玻璃中过冷液的粘度，这是互连实验的基础数据。结果表明，在578K的玻璃化温度下，过冷液体的粘度可用Arrhenius方程表示，其粘度为3×10^&lt；10&gt；pA·S。在2x^&lt；1O-9&gt；Torr的高真空度下，用Ar离子在5kV和40 mA下刻蚀3hr的金属玻璃，在50 Mpa的压力下加热到玻璃化转变温度，实现了金属玻璃的互连。通过保留玻璃相，实现了金属玻璃之间的互连。然而，结合状态还不够强，不足以检验结合强度。原因被认为是如下的。1)被Ar离子刻蚀的清洁表面在互联之前再次被污染，因为加热样品的时间很长。2)灯加热器加热真空室内部，导致真空室表面吸附气体的释放，导致气体析出。因此，在互联之前，清洁的表面再次被污染。3)由于加载导致了金属玻璃的整体变形，所以没有对表面施加足够的压力，以实现表面之间的完全接触。为了解决上述问题，我们对设备进行了如下改进。1)加热方式由灯加热改为感应加热，以实现快速加热和单独加热样品。2)我们正在生产模组，其中样品的侧面受到约束，以便通过加载实现表面的完全接触。我们将继续进行非晶态合金的互连实验。

We have at first investigated the viscosity of the supercooled liquid in a Pd_<40>Ni_<40>P_<20> metallic glass, which is fundamental data in experiments of interconnection. It was found that the viscosity of the supercooled liquid can be expressed by the Arrhenius-type equation and was 3X10^<10> Pa s at the glasstransition temperature of 578 K.The metallic glasses that were etched by argon ions at 5kV and 40 mA for 3 hr under a high vacuum of 2x^<1O-9> Torr, were interconnected by heating up to the glass transition temperature under a pressure of 50 MPa. An interconnection between the metallic glasses was achieved with retaining the glassy phase. However, the bonding state was not enough strong to examine the bonding strength. The reason was considered as follows. 1) The cleaned surfaces, which were etched by argon ions, were contaminated again before the interconnection because it took long time to heat the samples. 2) The lamp heater heated the inside of the vacuum chamber and leaded to gas evolution that resulted from release of gas adsorbed on the surface of the vacuum chamber. Accordingly, the cleaned surfaces were contaminated again before the interconnection. 3) The pressure, which was sufficient to achieving the full contact between the surfaces, was not applied on the surfaces, because the loading resulted in the over-all deformation of metallic glasses. In order to resolve the problems described above, we are improving the apparatus as follows. 1) The method of heating is being changed from lamp heater to induction heater to achieve rapid heating and to heat the samples alone. 2) We are producing die sets in which the side of samples is under constraint so that full contact of the surfaces is achieved by loading. We will continue the experiments of interconnection in amorphous alloys.