"Highly Preferred Carbon Thin Films Obtained by DC Magnetron Sputtering with a Hot Filament"

本工作的目的是研究碳薄膜的晶体状态，并找出作为功能材料应用于电子器件的可能性。在这项工作中，使用钨热丝直流磁控溅射系统获得了高取向的晶体碳薄膜。不同于化学气相沉积法使用氢作为载气与热灯丝。只使用纯氩气。用XRD研究了碳薄膜的晶体结构。XPS, TEM。TED和FE-SEX分析。所得结果如下：(1)通过XRD分析，证实形成了结晶的碳薄膜；(2)XPS谱图显示了碳原子含量超过90%的薄膜。(3)通过TEM、TED和FE-SEX分析发现，晶体碳膜由纳米晶粒和纳米纤维组成。(4)为了确定薄膜碳原子的价态，对激光拉曼光谱进行了检测，发现薄膜在1581 cm^<-1>、1387cm^<-1>和1979 cm^<-1>处有三个拉曼带，前两个峰属于多晶石墨，最后一个峰对应碳的同素异形体碳炔。结论：采用直流磁控管热丝作为热电子发射源，制备出了由碳纳米管等无空心纳米级纤维晶体组成的高取向多晶碳薄膜。由此获得的碳薄膜被认为是一种新型的纳米级碳纤维晶体，碳炔作为一维碳结构的检测是非常有趣的。

The purpose of this work is to examine the crystal condition of carbon thin films and to find out the possibility of application to electronic devices as a functional materials.In this work , highly oriented crystalline carbon thin films were obtained using a DC magnetron sputtering system with a tungsten hot filament. Differing from the chemical vapor deposition method using hydrogen as a carrier gas with a hot filament . only pure argon gas was employed. The crystal structure of the carbon thin films was investigated by XRD.XPS, TEM.TED and FE-SEX analysis.Results obtained in this work are as follows :(1) According to XRD analysis, it was confirmed that the crystallized carbon thin films were formed(2) XPS profiles show the contents of the films which were formed by more than 90 % of carbon atoms.(3) As the results of the observation by using TEM, TED and FE-SEX analysis, it was revealed that crystalline carbon films consisted of nano crystal grains and nano fibers.(4) To determine the valence state of the carbon atoms of the films, Laser Raman Spectra was examined and was found to be that the films have three Raman bands at 1581 cm^<-1>,1387cm^<-1> and 1979 cm^<-1> The first two peaks belong to polycrystalline graphite and the last peak corresponds to carbyne, one of the allotropes of carbon.Conclusions : Highly oriented polycrystalline carbon thin films consisting of nano scale fibrous crystallites without hollow inside like carbon nanotubes were grown by DC magnetron hot filament as thermal electron emission source. Carbon thin films thus obtained are considered to be a new type of nano-scale carbon fibrous crystallites and the detection of carbyne is very interesting as one dimensional carbon structure.