FEASIBILITY OF MULTIELECTRODE FABRICATION AND ASSEMBLY

用于中枢神经单单位记录的多电极阵列 该系统已在密歇根大学开发。 该装置的初步结果表明，它可以提供一个显着的 神经生理学研究的进展， 沟通过程和未来在神经假体中的应用。 向神经生理学家广泛提供这种设备将是 如果要实现设备的全部潜力，这是必要的。 该阵列制造使用微电子学和 硅微机械加工利用定制工艺。 第一阶段目标 是开发一个与工业半导体兼容的工艺流程表， 工艺室和确定装配程序和设备测试 生产一个用户准备好的设备。 最终目标是使 在确定可行性后， 成本效益的生产。 此外，拟议的研究将 为各种生物传感器的其他研发工作做出贡献 结合了片上电路和感测元件。 第二阶段目标 执行本阶段确定的制造和装配计划 我研究和评估它的产量，可靠性，质量和经济性。

A Multielectrode array for single-unit recording in the central nervous system has been under development at The University of Michigan. Preliminary results of the device indicate it could provide a remarkable advance for neurophysiological investigations in such areas as communicative processes and future applications in neural prostheses. Providing this device to neurophysiologists on a wide-spread basis would be necessary if the full potential of the device were to be realized. The array fabrication uses a novel combination of microelectronics and silicon micromachining utilizing a custom process. The Phase I objectives are to develop a process schedule compatible with industrial semiconductor process houses and identify the assembly procedures and device testing needed to produce a user-ready device. The ultimate goal is to make the multielectrode array commercially available after determining feasibility of cost-effective production. Additionally, the proposed research will contribute to other R&D efforts for a variety of biological sensors incorporating on-chip circuitry and sensing elements. Phase II objective are to implement fabrication and assembly schedules determined in the Phase I research and evaluate its yield, reliability, quality and economics.