Particle Impact Deposition for the Manufacture of Next Generation Electroceramics

颗粒冲击沉积（AD）是一种新型的固体涂层技术，通过超声速气体射流将细颗粒加速到高速并撞击到基片上，从而形成薄的功能晶圆/薄膜。冲击速度需要超过与材料和工艺相关的临界速度，以使颗粒变形并粘附在基材上。所生产的薄膜在传感器、热电发电机、超导体、燃料电池、电池和磁性材料的微致动器和组件中有应用。与传统的热喷涂技术相比，该技术具有优势，例如，氧/温度敏感材料的沉积稳定性。然而，撞击和保留的效率较低，获得理想薄膜性能的条件尚不清楚，限制了该技术的发展。在本项目中，计划对微米级颗粒的撞击动力学进行建模和实验相结合的研究。目的是通过对颗粒撞击和变形的建模以及验证的实验工作，更好地了解沉积过程中颗粒撞击和成膜的机制。项目成果将有助于识别、控制和修改不利影响沉积过程效率和所生产薄膜质量的因素（与材料和/或工艺有关）。这有助于加强后两者，而后者又可导致该技术在工业上得到更广泛的应用。

Particle impact deposition (AD) is a new solid-state coating technique by which fine particles are accelerated to high velocities by a supersonic gas jet and impacted onto a substrate to build up a thin functional wafer/film. The impact velocity needs to exceed a material- and process-dependent critical velocity to deform particles and adhere them to the substrate. The produced film has applications in micro-actuators and components in sensors, thermoelectric generators, superconductors, fuel cells, batteries and magnetic materials. The technique offers advantages over traditional thermal spray techniques, e.g. stability for the deposition of oxygen/temperature-sensitive materials. However, the efficiency of impingement and retention is low and the conditions for attaining desirable film properties are not well-understood, limiting the development of the technique. In this project, a combined modelling and experimental work on the impact dynamics of micrometre-sized particles is planned. The aim is to obtain a better understanding of the mechanisms of particle impact and film formation during the deposition process by modelling of particle impact and deformation and experimental work for validation. The project outcome will help identify, control and modify the factors (material and/or process-related) that adversely affect the efficiency of the deposition process and quality of the produced films. This contributes to the enhancement of the latter two, which in turn can lead to the more widespread industrial use of the technique.