Integrated active microcantilevers for high-throughput nanometrology

点击翻译按钮获取中文摘要

This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.