Integrated active microcantilevers for high-throughput nanometrology

用于高通量纳米计量学的集成有源微悬臂梁

• 批准号: DE240100507
• 负责人: Dr Michael Ruppert
• 金额: $ 30.78万
• 依托单位: The University of Newcastle
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Early Career Researcher Award
• 财政年份: 2024
• 资助国家: 澳大利亚
• 起止时间: 2024-08-01 至 2027-07-31
• 项目状态: 未结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DE240100507
• 关键词: Integrated; active; microcantilevers; throughput; nanometrology

This project aims to develop a new versatile, high-performance microsensor platform and microscopy method for measuring nano-scale structures. The proposed microscopy tool is expected to significantly increase imaging speed and miniaturize system footprint, thereby enabling high-throughput quality control of semiconductor devices. The expected outcome is a highly-scalable and low-cost imaging system that will close the technology gap between fabrication and inspection at the nanoscale. The benefits to Australia should include the potential for commercialization to develop this next-generation microscopy tool in high-value market sectors.

该项目旨在开发一种新的多功能、高性能的微传感器平台和显微方法来测量纳米级结构。拟议的显微镜工具预计将显著提高成像速度并使系统占地面积小型化，从而实现半导体设备的高通量质量控制。预期的结果是一种高度可扩展和低成本的成像系统，它将缩小纳米级制造和检查之间的技术差距。对澳大利亚的好处应该包括在高价值市场部门开发这种下一代显微镜工具的商业化潜力。