Transport phenomena in microelectronics & metals processing

微电子学中的输运现象

• 批准号: 41696-2008
• 负责人: Hasan, Mainul
• 金额: $ 1.61万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2010
• 资助国家: 加拿大
• 起止时间: 2010-01-01 至 2011-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=450825
• 关键词: Transport; phenomena; microelectronics; metals; processing

Under the general theme of transport phenomena in microelectronics and metals processing, the applicant wishes to carry out fundamental research in two areas of direct industrial importance. These are concerned with: (a) Mathematical and physical modeling of co-deposition of SiO2 and GeO2 in Modified Chemical Vapor Deposition (MCVD) reactors, and (b) ultrasonic de-agglomeration and dispersion of particles in liquid metals and fluids. (a) MCVD reactors are used to commercially manufacture high quality optical fibers. A MCVD reactor consists of a slowly rotating, fire polished, heated silica tube wherein a mixture of gaseous silicon tetrachloride (SiCl4), germanium tetrachloride (GeCl4) and oxygen is introduced. The reaction products of interest are fine particles of SiO2 and GeO2 which deposit onto the inner surface of the tube. After a sufficient number of layers are deposited, the tube is collapsed into a solid preform rod and then drawn into a long thin fiber. The first objective of this work is to develop a transient 3D transport model which will provide temperature, velocity and concentration profiles as well as deposition rates of SiO2 and GeO2 inside the reactor. The second objective is to perform MCVD experiments in an arranged experimental research facility in China. Experimental results will be used to verify modeling results and the model will be appropriately tuned and/or modify to provide satisfactory results. (b) Dispersion and de-agglomeration of powders are required in many processes in the metals, pharmaceutical, chemical, paint and ink industries. Powder of any particle size tends to form agglomerates when being mixed into a liquid. Therefore, effective means of de-agglomerating and dispersing are required to overcome the bonding forces after wetting the micron- or nano-powders. Mathematical and physical models will be developed to explain the ultrasonic dispersion phenomenon of fine particles in fluids. An ultrasonic device will also be developed to measure bubbles' particles loading characteristics to make efficient flotation columns for industry

在微电子和金属加工中的输运现象的总体主题下，申请人希望在两个具有直接工业重要性的领域开展基础研究。这些涉及：(a) 改良化学气相沉积 (MCVD) 反应器中 SiO2 和 GeO2 共沉积的数学和物理建模，以及 (b) 液态金属和流体中颗粒的超声波解聚和分散。 (a) MCVD 反应器用于商业化制造高质量光纤。 MCVD 反应器由缓慢旋转、火焰抛光、加热的石英管组成，其中引入气态四氯化硅 (SiCl4)、四氯化锗 (GeCl4) 和氧气的混合物。感兴趣的反应产物是沉积在管内表面上的 SiO2 和 GeO2 细颗粒。沉积足够数量的层后，管子被折叠成实心预制棒，然后拉制成细长的光纤。这项工作的第一个目标是开发瞬态 3D 输运模型，该模型将提供反应器内 SiO2 和 GeO2 的温度、速度和浓度分布以及沉积速率。第二个目标是在中国安排的实验研究设施中进行MCVD实验。实验结果将用于验证建模结果，并且模型将被适当调整和/或修改以提供令人满意的结果。 (b) 金属、制药、化学、油漆和油墨行业的许多工艺都需要粉末的分散和解聚。任何粒径的粉末在混合到液体中时都容易形成附聚物。因此，需要有效的解聚和分散方法来克服微米或纳米粉末润湿后的结合力。将开发数学和物理模型来解释流体中细颗粒的超声波分散现象。还将开发超声波设备来测量气泡的颗粒负载特性，从而为工业制造高效的浮选柱