Optical profiler with dynamic micro electro-mechanical systems capability
Optical profiler with dynamic micro electro-mechanical systems capability
批准号:
LE110100024
负责人:
Hon Prof Deborah Kane
金额:
$16.0万
依托单位:
依托单位国家:
澳大利亚
项目类别:
Linkage Infrastructure, Equipment and Facilities
财政年份:
2011
资助国家:
澳大利亚
项目状态:
已结题
起止时间:
2011-03-01 至 2012-12-31
中文摘要
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英文摘要
This facility will allow Australian researchers to access the world's best capability in dynamic, time resolved, optical three-dimensional profiling of surfaces and devices. It will advance a raft of science research and industry applications characterising natural and artificial materials and underpinning next generation optical, photonic and microelectronic devices.
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会议论文
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依托单位:
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负责人:Hon Prof Deborah Kane
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依托单位:
海外基金