针对超大规模集成电路的快速发展对超低介电常数材料迫切需求，在前期工作的基础上，申请人拟开展基于笼型倍半硅氧烷（POSS）调控制备的超低介电常数苯并噁嗪/氰酸酯纳米多孔复合材料的研究。利用POSS的重排反应，通过水杨醛路线，实现不同分子尺寸苯并噁嗪基POSS的可控合成；研究苯并噁嗪基POSS分子尺寸、加入量以及树脂配比对复合材料的纳米多孔结构和有机-无机交联结构的影响，实现对复合材料微观结构的控制；阐明纳米多孔结构与复合材料介电性能的影响，评价纳米多孔结构与三嗪环结构的双重作用对降低复合材料介电性能的效果，揭示复合材料的有机-无机交联结构与热、力学等性能的内在联系；综合建立复合材料组成-微观结构-宏观性能间的关系，对宏观性能进行有效调控，以制备得到介电常数小于2.0的高性能苯并噁嗪/氰酸酯复合材料，并为其走向应用提供技术基础。

As the continuing development of the Ultra Large-Scale Integrated Circuits(ULSI), a new generation of low dielectric constant material urgently needs to be developed. In this project, we propose to prepare a novel ultra-low dielectric constant benzoxazine/cyanate ester nano-porous composite material based on the regulation of polyhedral oligomeric silsesquioxane (POSS). Due to the rearrangement reaction of POSS, different molecular sizes benzoxazinyl-POSSes will be controllably synthesized through the salicylaldehyde route. The effect of the molecular size and the amount of benzoxazinyl-POSS and the ratio of two resins to the nano-porous structures and the organic-inorganic crosslinked structures will be researched to control the microstructures of composite material. The impact of the nano-porous structure to the dielectric properties of composite material will be clarified. The dual effects of the nano-porous structures and the triazine ring structure to the decrease of dielectric constant will be evaluated. And the intrinsical link between the organic-inorganic crosslinked structures and the thermal, mechanical and other properties of composite material will be revealed. Then the relationships between composition- microstructures - macroscopic properties will be built. Finally, the macroscopic properties of composite material can be controlled to get a high-performance benzoxazine/cyanate ester composite material with the dielectric constant less than 2.0.