微细电火花直写三维铁基微型超级电容器及其热氧化机理研究

共面微型超级电容器因具有功率密度高、寿命长、操作温度范围广、安全性好、维护简单且易于与其他微型电子器件集成等优点而日益成为了微型储能器件的研究热点。针对其制造工艺复杂和能量密度低的瓶颈问题，本项目提出了微细电火花直写三维铁基赝电容微型超级电容器的制造新方法，实现了三维铁基集流体和铁基活性材料的一体化三维微电极结构的一步法制造。拟结合有限元分析方法，探索电火花直写三维铁基赝电容材料的热氧化机理，研究其材料成分、结构、形貌、导电性与其电容性能的内在关系与调控机理。阐明电火花直写工艺参数、材料成分、材料结构、材料形貌、活性材料负载量、电解液、器件结构参数与器件储能机制及性能的内在规律，建立免预图案化集流体、免模板、免粘合剂、材料之间结合力强、环保、高精度、高效率的电火花直写高能量密度赝电容微型超级电容器的新工艺与新理论，对于低成本制造高性能三维铁基微型超级电容器有着重要的科学价值和应用前景。

Planar micro-supercapacitors attracts increasing research attentions recently, this is attributed to their intrinsic advantages, such as high power density、long lifetime、wide operating temperature range、good safety、easy maintenance and easily integrated with other micro electronic devices. However, their complicated manufacturing process and low energy density greatly limits their further development. Herein, we propose a new fabrication strategy called micro electrical discharge direct writing of three-dimensional (3D) iron based pseudocapacitive micro-supercapacitors, which can realize one step fabrication of integrated 3D structure micro electrodes with iron based current collector and iron based active materials. Based on finite element method, we will explore the thermal oxidation mechanism of 3D iron based pseudocapacitive materials fabricated by micro electrical discharge direct writing. Subsequently, We will investigate the internal relationship and regulative mechanism between their material compositions、structure、morphology、electrical conductivity and capacitive properties. We will explore the inherent principle between processing parameters of micro electrical discharge direct writing, material compositions, material structure, material morphology, active material mass loading, electrolytes, device structure and device energy storage mechanism and performance. We are aiming at development of new strategy and new theory to fabricate high energy density pseudocapacitive micro-supercapacitors by micro electrical discharge direct writing, which has the advantages of pre-patterned current collector free, template free, binder free, strong binding force between different materials, environmental friendliness, high precision and high efficiency. This low cost manufacturing strategy is beneficial to fabricate 3D iron based micro-supercapacitors and shows great scientific value and application prospects.