基于模态局部化效应的谐振式光谱敏感机理及微型光谱传感器研究

MEMS谐振式传感器工作在模态局部化效应机制下具备更好的性能，同时兼备高精度测量和尺寸微型化优点。但光谱的多物理场模态局部化传感难以被激励、检测和调制。本项目研究多物理场的模态局部化光谱敏感机理，并基于该机理研究高灵敏度、高分辨率微型光谱传感器。研究内容包括：（1）基于光声效应的光-机耦合机理，提出模态局部化微谐振器的激励方法和扰动方法；（2）基于模态局部化的光谱敏感机理，提出光谱敏感方法和检测计量标准；（3）模态局部化微型光谱传感器系统设计、制备及调控，提出光谱传感器弱耦合、模式混叠、自由度、品质因数、共振频率、尺寸等调控机理，揭示各参量对传感器灵敏度、分辨率的影响规律，建立最优光谱传感和计量策略。本项目成果最终实现一种兼备高精度测量和尺寸可微型化的光谱测量技术，为推进光谱仪高精度、小型化发展提供理论指导和技术支撑。

The MEMS resonant sensor has better performance under the mode localization mechanism, and has the advantages of high-precision measurement and miniaturization. However, the mode localization is difficult to stimulate, detect and modulate under multi-physics field for light spectrum sensing. This project studies the multiphysics mode localized spectral sensitivity mechanism, and based on this mechanism, studies high-sensitivity, high-resolution miniature spectral sensors. The research contents include: (1) Based on the photoacoustic coupling mechanism, study the excitation method and perturbation method of the mode localized microresonator; (2) Study the spectral sensing method based on the mode localization mechanism and establish the measurement standards; (3) Design, manufacture and control study of the sensor system, proposes the control mechanism of weak coupling, mode aliasing, degree of freedom, quality factor, resonance frequency, footprint, etc., and reveals the associations of the parameters. Thus establish the optimal spectral sensing strategies. The results of this study realize a high precision miniature spectral sensor and provide theoretical guidance and technical support for the development of high-precision and miniaturization spectrometers.